Image processing (Histogram equalization)

Evaluation environment
Coaxial tube:MS-200-TWL
Objective lens: PEIR Plan 50X
Camera:BU406M(2048 x 2048, 5um)
Light source: SIS-150-AIR + band pass 1100nm
Inspecting object: Pattern of Silicon wafer from back side

 

<Original image>                                                                                                          Histogram

 

<Processed image  #1>

 

<Processed image  #2>