5.24MP / 1.3MP/ 0.32MP SWIR Camera
(SONY IMX992/ IMX990/ IMX991)
These camera support wide wavelength range from visible light to SWIR (400nm to 1700nm).
These are suitable for inspecting pattern of silicon wafer from back side.
[USB3 Type]
| Model | SDV-992A-USB3 | SDV-990A-USB3 | SDV-991A-USB3 |
| Sensor | SONY :IMX992 | SONY :IMX990 | SONY: IMX991 |
| Resolution | 2560(H) x 2048(V) | 1280(H) x 1024(V) | 640(H) x 512(V) |
| Pixel size | 3.45um x 3.45um | 5um x 5um | 5um x 5um |
| Scan area | 8.8mm x 7.1mm (Diagonal =11.3mm) | 6.4mm x 5.12mm (Diagonal = 8.2mm) | 3.2mm x2.56mm (Diagonal = 4.1mm) |
| Interface | USB3.0 | USB3.0 | USB3.0 |
| Shutter | Global shutter system | Global shutter system | Global shutter system |
| Available wavelength | 400nm – 1700nm | 400nm – 1700nm | 400nm – 1700nm |
| Frame rate | 12bit ( Maximum 32fps) | 12bit ( Maximum 72fps) | 12bit ( Maximum 137fps) |
| SNR | TBD | 51dB | 51dB |
| Power | Input voltage : DC 12V | Input voltage : DC 12V | Input voltage : DC 12V |
| Lens mount | C mount | C mount | C mount |
| Operation temperature | 10 ～40℃ | 10 ～40℃ | 10～40℃ |
| Storage temperature | 0～60℃ | 0～60℃ | 0～60℃ |
| Dimension | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) |
[Camera Link type]
| Model | SDV-990A-CL | SDV-991A-CL |
| Sensor | SONY :IMX990 | SONY: IMX991 |
| Resolution | 1280(H) x 1024(V) | 640(H) x 512(V) |
| Pixel size | 5um x 5um | 5um x 5um |
| Scan area | 6.4mm x 5.12mm (Diagonal = 8.2mm) | 3.2mm x2.56mm (Diagonal = 4.1mm) |
| Interface | Camera Link | Camera Link |
| Output connector | SDR26pin | SDR26pin |
| Shutter | Global shutter system | Global shutter system |
| Available wavelength | 400nm – 1700nm | 400nm – 1700nm |
| Exposure time | 20.3um sec – 2 sec | 20.3um sec – 2 sec |
| Frame rate | 12bit ( Maximum 72fps) | 12bit ( Maximum 137fps) |
| SNR | 51dB | 51dB |
| Power | Input voltage : DC 12V | Input voltage : DC 12V |
| Lens mount | C mount | C mount |
| Operation temperature | 10 ～40℃ | 10～40℃ |
| Storage temperature | 0～60℃ | 0～60℃ |
| Dimension | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) | 71.6(W) x 61.5(H) x 78.0(D) mm (Excluding protrusions) |
Graph showing wavelength and relative quantum efficiency of the above models
Example of use (IR microscope)
>> SIS-150 series (Infrared halogen light)
>> PE IR series (Objective lens for NIR)
>> PE IR 2000 series (Objective lens for SWIR)
>> MS-200-IR1700 (Coaxial tube for SWIR)
The following pictures show the images of viewing silicon wafer from back side by irradiating with different light.
Other example of use
