[Evaluation environment]
Coaxial tube:MS-200-TWL
Objective lens: PEIR Plan 20X
Camera:BU406M(2048 x 2048, 5um)
Light source: SIS-150-AIR + band pass 1150nm
Inspecting object: pattern of silicon wafer
<Original image > <Processed image>
<Review>
After processing the original image, there are not any shadows in the processed image and the edges become quite sharper.
[Evaluation environment]
Macro Lens :MS-016
Camera: BU130M (1280 x 960, 3.75um)
Lighting: Visible light
Inspecting object: Name card
<Original image > <Processed image>
<Review>
Comparing the original image,the each character in the processed image become quite sharper.