Wafer Exposure System (Mask Aligner) for LED

Full Automatic Exposure system for LED chip

 

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There are the following 2 type of Full Automatic Exposure System for LED.
2-4 inch combined use type, and 4-6 inch combined use type
[Use]
For Micro LED or LED
[Specification]
Tact Capacity
⇒1st 150pcs or more/ 1hour

⇒2nd 130pcs or more/1hour
Alignment Accuracy
⇒0.5μm or less